Although conventional sensors are commercially still very much in use, over’ the last three decades, the use ofsolidstate sensors also have been increased. In this category,the semiconductor micro and .nano-sensors, ceramic and chemical sensors using new materials and technologies .such as Ie technology, VIJSIchips, arid micromachining techniques are Included. .For’ ~semiconductormicro:,sensors, the IC ,technology comprisng of photo lithographic etching,deposition, metallization, and assembling is essential and this is .the basis for thick and thin ‘film, chemical and electrochemical, and biologieal.sensors. IC elements a renow extensively used in the measurement of temperature, flow. and magnetic field.
Thick Film Sensors